Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11398372 | Plasma processing apparatus and plasma processing method | Hiromi Asakura, Syouzou Watanabe, Noriyuki Matsubara, Mitsuru Hiroshima, Toshihiro Wada | 2022-07-26 |
| 11361944 | Plasma processing method, and element chip manufacturing method | Atsushi Harikai | 2022-06-14 |
| 11355323 | Plasma processing apparatus and method therefor | — | 2022-06-07 |
| 11335564 | Element chip smoothing method and element chip manufacturing method | Akihiro Itou, Atsushi Harikai, Toshiyuki TAKASAKI | 2022-05-17 |
| 11289428 | Element chip manufacturing method | Kiyoshi Arita, Hidehiko Karasaki | 2022-03-29 |
| 11219929 | Element chip cleaning method, element chip cleaning apparatus, and element chip manufacturing method | Akihiro Itou, Atsushi Harikai, Toshiyuki TAKASAKI, Hidefumi SAEKI | 2022-01-11 |