Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11398372 | Plasma processing apparatus and plasma processing method | Shogo Okita, Hiromi Asakura, Noriyuki Matsubara, Mitsuru Hiroshima, Toshihiro Wada | 2022-07-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11398372 | Plasma processing apparatus and plasma processing method | Shogo Okita, Hiromi Asakura, Noriyuki Matsubara, Mitsuru Hiroshima, Toshihiro Wada | 2022-07-26 |