Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11361944 | Plasma processing method, and element chip manufacturing method | Shogo Okita | 2022-06-14 |
| 11335564 | Element chip smoothing method and element chip manufacturing method | Akihiro Itou, Toshiyuki TAKASAKI, Shogo Okita | 2022-05-17 |
| 11219929 | Element chip cleaning method, element chip cleaning apparatus, and element chip manufacturing method | Akihiro Itou, Toshiyuki TAKASAKI, Hidefumi SAEKI, Shogo Okita | 2022-01-11 |