Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11385167 | Beamsplitter based ellipsometer focusing system | — | 2022-07-12 |
| 11378451 | Bandgap measurements of patterned film stacks using spectroscopic metrology | Tianhan Wang, Aaron Rosenberg, Dawei Hu, Alexander Kuznetsov, Manh Dang Nguyen +8 more | 2022-07-05 |
| 11346768 | Vortex polarimeter | Kenneth E. James, Pedro Vagos | 2022-05-31 |
| 11346790 | Focus system for oblique optical metrology device | Amit Shachaf, Daniel Thompson | 2022-05-31 |