Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515180 | Wafer-heating device | Hiroshi Takebayashi, Natsuki HIRATA | 2022-11-29 |
| 11476147 | Wafer holding table | Takuya Yanoh | 2022-10-18 |
| 11437260 | Heater for semiconductor manufacturing apparatus | Keita Yamana, Kazuhiro Nobori | 2022-09-06 |