Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515180 | Wafer-heating device | Kengo Torii, Natsuki HIRATA | 2022-11-29 |
| 11469118 | Member for semiconductor manufacturing apparatus | — | 2022-10-11 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515180 | Wafer-heating device | Kengo Torii, Natsuki HIRATA | 2022-11-29 |
| 11469118 | Member for semiconductor manufacturing apparatus | — | 2022-10-11 |