Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11437260 | Heater for semiconductor manufacturing apparatus | Keita Yamana, Kengo Torii | 2022-09-06 |
| 11398401 | Wafer mounting table and method of manufacturing the same | Yuji AKATSUKA, Masaki Ishikawa, Akiyoshi Hattori, Keiichi Nakamura | 2022-07-26 |