Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11480871 | Apparatus and method for improving accuracy of imprint force application in imprint lithography | Nilabh K. Roy | 2022-10-25 |
| 11454883 | Template replication | Byung-Jin Choi, Anshuman Cherala | 2022-09-27 |
| 11443940 | Apparatus for uniform light intensity and methods of using the same | Nilabh K. Roy, Masaki Saito | 2022-09-13 |
| 11347144 | Overlay improvement in nanoimprint lithography | Anshuman Cherala, Byung-Jin Choi | 2022-05-31 |