Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11480871 | Apparatus and method for improving accuracy of imprint force application in imprint lithography | Mario Johannes Meissl | 2022-10-25 |
| 11443940 | Apparatus for uniform light intensity and methods of using the same | Mario Johannes Meissl, Masaki Saito | 2022-09-13 |
| 11366384 | Nanoimprint lithography system and method for adjusting a radiation pattern that compensates for slippage of a template | Anshuman Cherala | 2022-06-21 |
| 11327409 | Systems and methods for curing an imprinted field | Anshuman Cherala | 2022-05-10 |