Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11454883 | Template replication | Byung-Jin Choi, Mario Johannes Meissl | 2022-09-27 |
| 11366384 | Nanoimprint lithography system and method for adjusting a radiation pattern that compensates for slippage of a template | Nilabh K. Roy | 2022-06-21 |
| 11347144 | Overlay improvement in nanoimprint lithography | Mario Johannes Meissl, Byung-Jin Choi | 2022-05-31 |
| 11327409 | Systems and methods for curing an imprinted field | Nilabh K. Roy | 2022-05-10 |
| 11262652 | Nanofabrication method with correction of distortion within an imprint system | Ahmed M. Hussein | 2022-03-01 |