Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495833 | Cylindrical battery | Natsuhiko Mukai, Satoshi Yamamoto, Masaki Deguchi, Taisuke Yamamoto, Masanobu Takeuchi | 2022-11-08 |
| 11483917 | Chamber device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method | Takayuki OSANAI, Koichiro Koge | 2022-10-25 |
| 11366394 | Extreme ultraviolet light generation system and electronic device manufacturing method | Koichiro Koge, Takayuki OSANAI | 2022-06-21 |
| 11363705 | Extreme ultraviolet light generation apparatus, extreme ultraviolet light generation system, and electronic device manufacturing method | Takayuki OSANAI, Koichiro Koge, Akihiro Ohsawa, Toshiya Shintani, Yoshiaki Yoshida +2 more | 2022-06-14 |
| 11350514 | Extreme ultraviolet light generation apparatus, and electronic device manufacturing method | Koichiro Koge, Takayuki OSANAI | 2022-05-31 |
| 11272608 | Extreme ultraviolet light generation apparatus and electronic device manufacturing method | Shinji Nagai | 2022-03-08 |