Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11363705 | Extreme ultraviolet light generation apparatus, extreme ultraviolet light generation system, and electronic device manufacturing method | Takayuki OSANAI, Atsushi Ueda, Koichiro Koge, Akihiro Ohsawa, Yoshiaki Yoshida +2 more | 2022-06-14 |