Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11483917 | Chamber device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method | Atsushi Ueda, Koichiro Koge | 2022-10-25 |
| 11366394 | Extreme ultraviolet light generation system and electronic device manufacturing method | Koichiro Koge, Atsushi Ueda | 2022-06-21 |
| 11363705 | Extreme ultraviolet light generation apparatus, extreme ultraviolet light generation system, and electronic device manufacturing method | Atsushi Ueda, Koichiro Koge, Akihiro Ohsawa, Toshiya Shintani, Yoshiaki Yoshida +2 more | 2022-06-14 |
| 11350514 | Extreme ultraviolet light generation apparatus, and electronic device manufacturing method | Koichiro Koge, Atsushi Ueda | 2022-05-31 |