Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11373862 | Surface modified depth controlled deposition for plasma based deposition | Adrien LaVoie, Purushottam Kumar | 2022-06-28 |
| 11293098 | Dielectric gapfill using atomic layer deposition (ALD), inhibitor plasma and etching | Purushottam Kumar, Bart J. van Schravendijk, Adrien LaVoie | 2022-04-05 |