Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11236422 | Multi zone substrate support for ALD film property correction and tunability | Michael Philip Roberts, Ramesh Chandrasekharan, Pulkit Agarwal, Aaron Bingham, Ashish Saurabh +1 more | 2022-02-01 |