Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476381 | Single photon detector and system for minimizing dark current | Soo-hyun Baek, Jung Hyun Kim | 2022-10-18 |
| 11242601 | Showerhead and substrate processing apparatus including the same | Sung Tae Je, Jae Ho Lee, Gil Sun Jang, Chang Hoon Yun, Han June Lim +1 more | 2022-02-08 |