Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11488845 | Substrate processing apparatus | Cha-young Yoo, Kyu Jin Choi, Ja Dae Ku, Jun Young Kim, Bong Ju Jung +3 more | 2022-11-01 |
| 11242601 | Showerhead and substrate processing apparatus including the same | Chan-Yong Park, Jae Ho Lee, Gil Sun Jang, Chang Hoon Yun, Han June Lim +1 more | 2022-02-08 |