Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11242601 | Showerhead and substrate processing apparatus including the same | Sung Tae Je, Chan-Yong Park, Jae Ho Lee, Gil Sun Jang, Chang Hoon Yun +1 more | 2022-02-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11242601 | Showerhead and substrate processing apparatus including the same | Sung Tae Je, Chan-Yong Park, Jae Ho Lee, Gil Sun Jang, Chang Hoon Yun +1 more | 2022-02-08 |