Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11333982 | Scaling metric for quantifying metrology sensitivity to process variation | Noa Armon, Dana Klein | 2022-05-17 |
| 11249400 | Per-site residuals analysis for accurate metrology measurements | Lilach Saltoun, Dana Klein | 2022-02-15 |
| 11237120 | Expediting spectral measurement in semiconductor device fabrication | Vincent Immer, Etay Lavert | 2022-02-01 |