Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11469135 | Substrate placing part that is arranged in substrate processing apparatus | Ho Chul Kang | 2022-10-11 |
| 11417562 | Substrate supporting apparatus | Dong Seok Chun, Jeong Mi Kim, Jong Sik Kim, Won Woo Jung, Min Ho CHEON | 2022-08-16 |
| 11371142 | Substrate processing apparatus having exhaust gas decomposer, and exhaust gas processing method therefor | Dong Won SEO, Heon Do Kim | 2022-06-28 |