Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11488803 | Substrate processing apparatus | — | 2022-11-01 |
| 11469135 | Substrate placing part that is arranged in substrate processing apparatus | Chul Joo HWANG | 2022-10-11 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11488803 | Substrate processing apparatus | — | 2022-11-01 |
| 11469135 | Substrate placing part that is arranged in substrate processing apparatus | Chul Joo HWANG | 2022-10-11 |