Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11371142 | Substrate processing apparatus having exhaust gas decomposer, and exhaust gas processing method therefor | Heon Do Kim, Chul Joo HWANG | 2022-06-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11371142 | Substrate processing apparatus having exhaust gas decomposer, and exhaust gas processing method therefor | Heon Do Kim, Chul Joo HWANG | 2022-06-28 |