Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11387110 | Plasma processing apparatus and plasma processing method | — | 2022-07-12 |
| 11355319 | Plasma processing apparatus | Luke Joseph Himbele, Takashi Uemura, Tomoyoshi Ichimaru, Junya Sasaki | 2022-06-07 |
| 11232932 | Plasma processing apparatus and plasma processing method | Masatoshi KAWAKAMI, Kohei Sato, Masahiro Nagatani, Makoto Kashibe | 2022-01-25 |