Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11232932 | Plasma processing apparatus and plasma processing method | Masatoshi KAWAKAMI, Kohei Sato, Yasushi Sonoda, Makoto Kashibe | 2022-01-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11232932 | Plasma processing apparatus and plasma processing method | Masatoshi KAWAKAMI, Kohei Sato, Yasushi Sonoda, Makoto Kashibe | 2022-01-25 |