Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11482435 | Plasma processing apparatus | Tsutomu Nakamura, Hideki Kihara, Hiroho Kitada, Hidenobu Tanimura, Hironori Kusumoto | 2022-10-25 |
| 11232932 | Plasma processing apparatus and plasma processing method | Kohei Sato, Yasushi Sonoda, Masahiro Nagatani, Makoto Kashibe | 2022-01-25 |