Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11450513 | Atomic layer etching and smoothing of refractory metals and other high surface binding energy materials | Wenbing Yang, Tamal Mukherjee, Mohand Brouri, Samantha Tan, Keren Jacobs Kanarik | 2022-09-20 |
| 11450532 | Deposition of self assembled monolayer for enabling selective deposition and etch | Younghee Lee, Daniel Peter, Samantha Tan | 2022-09-20 |
| 11355353 | Tin oxide mandrels in patterning | Jengyi Yu, Samantha Tan, Seongjun Heo, Boris Volosskiy, Sivananda K. Kanakasabapathy +2 more | 2022-06-07 |
| 11322351 | Tin oxide films in semiconductor device manufacturing | Jengyi Yu, Samantha Tan, Yu Jiang, Hui-Jung Wu, Richard Wise +2 more | 2022-05-03 |