Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11450513 | Atomic layer etching and smoothing of refractory metals and other high surface binding energy materials | Tamal Mukherjee, Mohand Brouri, Samantha Tan, Yang Pan, Keren Jacobs Kanarik | 2022-09-20 |