Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11450513 | Atomic layer etching and smoothing of refractory metals and other high surface binding energy materials | Wenbing Yang, Tamal Mukherjee, Mohand Brouri, Samantha Tan, Yang Pan | 2022-09-20 |
| 11239094 | Designer atomic layer etching | — | 2022-02-01 |