Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11270906 | Burls with altered surface topography for holding an object in lithography applications | Mehmet Ali AKBAS, David Hart PETERSON, Tammo Uitterdijk, Richard B. Lewis, Iliya Sigal | 2022-03-08 |