Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11450554 | Method of forming material film, integrated circuit device, and method of manufacturing the integrated circuit device | Geumbi Mun, Jinyong Kim, Kwangtae Hwang, Iksoo Kim, Jiwoon Im | 2022-09-20 |
| 11322499 | Semiconductor device including storage node electrode including step and method of manufacturing the semiconductor device | Jaehwan Cho, Junghwan Oh, Sangho Lee, Jinwoo Bae, Sunghee Han +1 more | 2022-05-03 |
| 11264219 | Radical monitoring apparatus and plasma apparatus including the monitoring apparatus | Kwangtae Hwang, Jinyong Kim, Iksoo Kim, Geumbi Mun, Jiwoon Im | 2022-03-01 |