Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11456314 | Semiconductor device including transparent conductive oxide layer | Changsoo LEE, Jongmyeong Lee, Iksoo Kim | 2022-09-27 |
| 11450554 | Method of forming material film, integrated circuit device, and method of manufacturing the integrated circuit device | Geumbi Mun, Jinyong Kim, Junwon Lee, Kwangtae Hwang, Iksoo Kim | 2022-09-20 |
| 11264219 | Radical monitoring apparatus and plasma apparatus including the monitoring apparatus | Kwangtae Hwang, Jinyong Kim, Iksoo Kim, Geumbi Mun, Junwon Lee | 2022-03-01 |
| 11233494 | Electronic circuit for filtering signal received from plasma chamber | Hyungjoon Kim, Je-Dong LEE, Younghoon Kwon, Myoungwoon Kim, Il-Woo Kim +2 more | 2022-01-25 |
| 11225715 | Showerhead, semiconductor manufacturing apparatus including the same, and semiconductor manufacturing method | Byung-Sun Park, Ik Soo Kim, Sangho Rha, Minjae OH | 2022-01-18 |