Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11450554 | Method of forming material film, integrated circuit device, and method of manufacturing the integrated circuit device | Jinyong Kim, Junwon Lee, Kwangtae Hwang, Iksoo Kim, Jiwoon Im | 2022-09-20 |
| 11264219 | Radical monitoring apparatus and plasma apparatus including the monitoring apparatus | Kwangtae Hwang, Jinyong Kim, Iksoo Kim, Junwon Lee, Jiwoon Im | 2022-03-01 |