Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495479 | Light pipe window structure for thermal chamber applications and processes | Aaron Muir Hunter, Anzhong Chang | 2022-11-08 |
| 11462396 | Lamp cross-section for reduced coil heating | — | 2022-10-04 |
| 11393703 | Apparatus and method for controlling a flow process material to a deposition chamber | Alexander Lerner, Roey Shaviv, Phillip Stout, Prashanth Kothnur, Satish Radhakrishnan | 2022-07-19 |
| 11337277 | Circular lamp arrays | — | 2022-05-17 |