Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11499226 | Substrate supporting unit and a substrate processing device including the same | Seunghwan Lee, HakYong Kwon, SungBae Kim, JuHyuk Park | 2022-11-15 |
| 11488875 | Semiconductor substrate measuring apparatus and plasma treatment apparatus using the same | Junbum Park, Younghwan Kim, Youngjoo Lee, Yoojin Jeong | 2022-11-01 |
| 11309756 | Motor | Kyeonghwan Kim, Wonjung Sung, Gyeongjae Park, Hojun Shin, Junho Ahn +1 more | 2022-04-19 |