Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11499226 | Substrate supporting unit and a substrate processing device including the same | Seunghwan Lee, Jongsu Kim, SungBae Kim, JuHyuk Park | 2022-11-15 |
| 11453946 | Gas-phase reactor system including a gas detector | SungBae Kim, Youngmin Kim, KiKang Kim, Seunghwan Lee | 2022-09-27 |
| 11345999 | Method of using a gas-phase reactor system including analyzing exhausted gas | SungBae Kim, Youngmin Kim, KiKang Kim, Seunghwan Lee | 2022-05-31 |
| 11251040 | Cyclical deposition method including treatment step and apparatus for same | Seunghwan Lee, KiKang Kim, SungBae Kim, Jonghyun Ahn, SeongRyeong Kim | 2022-02-15 |