Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11499226 | Substrate supporting unit and a substrate processing device including the same | Seunghwan Lee, HakYong Kwon, Jongsu Kim, SungBae Kim | 2022-11-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11499226 | Substrate supporting unit and a substrate processing device including the same | Seunghwan Lee, HakYong Kwon, Jongsu Kim, SungBae Kim | 2022-11-15 |