Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495461 | Film stack for lithography applications | Tejinder Singh, Suketu Arun Parikh, Michael Stolfi, Jothilingam Ramalingam, Yong Cao +3 more | 2022-11-08 |
| 11437559 | Method and apparatus for deposition of multilayer device with superconductive film | Mingwei Zhu, Zihao Yang, Nag B. Patibandla, Ludovic Godet, Yong Cao +1 more | 2022-09-06 |
| 11313034 | Methods for depositing amorphous silicon layers or silicon oxycarbide layers via physical vapor deposition | Weimin Zeng, Yong Cao, Huixiong Dai, Khoi A. Phan, Christopher S. Ngai +2 more | 2022-04-26 |