Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11309163 | Multibeamlet charged particle device and method | Mehdi Vaez-Iravani, Krishna Sreerambhatla, Hussein Fawaz, Lior ENGEL, Robert Perlmutter | 2022-04-19 |
| 11237485 | System, software application, and method for lithography stitching | Yongan Xu, Robert Jan Visser, Ludovic Godet | 2022-02-01 |