Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11335563 | Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same | Baosuo Zhou, Mirzafer Abatchev, Ardavan Niroomand, Paul A. Morgan, Shuang Meng +1 more | 2022-05-17 |
| 11289639 | Electrical, mechanical, computing, and/or other devices formed of extremely low resistance materials | Douglas J. Gilbert, Y. Eugene Shteyn, Michael James Smith, Joel Patrick Hanna, Paul Greenland +1 more | 2022-03-29 |
| 11273469 | Controlling dry etch process characteristics using waferless dry clean optical emission spectroscopy | Deepak Vedhachalam, Francois C. Dassapa | 2022-03-15 |