Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11273469 | Controlling dry etch process characteristics using waferless dry clean optical emission spectroscopy | Brian J. Coppa, Deepak Vedhachalam | 2022-03-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11273469 | Controlling dry etch process characteristics using waferless dry clean optical emission spectroscopy | Brian J. Coppa, Deepak Vedhachalam | 2022-03-15 |