Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527434 | Line cut patterning using sacrificial material | Timothy Mathew Philip, Somnath Ghosh, Robert R. Robison | 2022-12-13 |
| 11515427 | Precise bottom junction formation for vertical transport field effect transistor with highly doped epitaxial source/drain, sharp junction gradient, and/or reduced parasitic capacitance | Kai Zhao, Shahab Siddiqui, Rishikesh Krishnan, Charlotte DeWan Adams | 2022-11-29 |
| 11257681 | Using a same mask for direct print and self-aligned double patterning of nanosheets | Stuart A. Sieg, Eric R. Miller | 2022-02-22 |