Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11531264 | Reflective mask blank, reflective mask and manufacturing method thereof, and semiconductor device manufacturing method | Yohei IKEBE | 2022-12-20 |
| 11480867 | Reflective mask blank, reflective mask and method of manufacturing semiconductor device | Yohei IKEBE, Takahiro Onoue, Hirofumi Kozakai | 2022-10-25 |
| 11281090 | Substrate with a multilayer reflective film, reflective mask blank, reflective mask, and method of manufacturing semiconductor device | Kazuhiro Hamamoto, Yohei IKEBE | 2022-03-22 |
| 11262647 | Substrate with multilayer reflective film, reflective mask blank, reflective mask, and semiconductor device manufacturing method | Kazuhiro Hamamoto | 2022-03-01 |
| 11249385 | Reflective mask blank, reflective mask, method of manufacturing same, and method of manufacturing semiconductor device | Yohei IKEBE | 2022-02-15 |