Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11500281 | Reflective film coated substrate, mask blank, reflective mask, and semiconductor device manufacturing method | Takashi Uchida | 2022-11-15 |
| 11281090 | Substrate with a multilayer reflective film, reflective mask blank, reflective mask, and method of manufacturing semiconductor device | Tsutomu Shoki, Yohei IKEBE | 2022-03-22 |
| 11262647 | Substrate with multilayer reflective film, reflective mask blank, reflective mask, and semiconductor device manufacturing method | Tsutomu Shoki | 2022-03-01 |