Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11480867 | Reflective mask blank, reflective mask and method of manufacturing semiconductor device | Yohei IKEBE, Tsutomu Shoki, Hirofumi Kozakai | 2022-10-25 |
| 11454878 | Substrate with multilayer reflective film, reflective mask blank, reflective mask and method of manufacturing semiconductor device | Hirofumi Kozakai | 2022-09-27 |
| 11237472 | Reflective mask blank, reflective mask and manufacturing method thereof, and semiconductor device manufacturing method | Yohei IKEBE, Junichi Horikawa, Mizuki KATAOKA | 2022-02-01 |