Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495453 | Vapor deposition precursor having excellent thermal stability and reactivity and preparing method therefor | Jung-Woo Park, Hyo Suk Kim, Min Sung Park | 2022-11-08 |
| 11472821 | Precursor compounds for atomic layer deposition (ALD) and chemical vapor deposition (CVD) and ALD/CVD process using the same | Jung Wun HWANG, Ki-Yeung Mun, Jun Won Lee, Kyu Hyun Yeom, Jung-Woo Park | 2022-10-18 |
| 11414434 | Rare earth precursor, method of manufacturing same and method of forming thin film using same | Jung-Woo Park, Hyo Suk Kim, Eun Jeong Cho | 2022-08-16 |
| 11401290 | Cobalt precursor, method of preparing same and method of manufacturing thin film using same | Jung-Woo Park, Hyo Suk Kim, Ming-Sung Park | 2022-08-02 |
| 11267828 | Silicon precursor and method of manufacturing silicon-containing thin film using the same | Jae Seok An, Jong-Ryul Park, Min-Hyuk NIM, Jung-Woo Park | 2022-03-08 |