Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495453 | Vapor deposition precursor having excellent thermal stability and reactivity and preparing method therefor | Jung-Woo Park, Jang-Hyeon Seok, Min Sung Park | 2022-11-08 |
| 11414434 | Rare earth precursor, method of manufacturing same and method of forming thin film using same | Jung-Woo Park, Jang-Hyeon Seok, Eun Jeong Cho | 2022-08-16 |
| 11401290 | Cobalt precursor, method of preparing same and method of manufacturing thin film using same | Jung-Woo Park, Jang-Hyeon Seok, Ming-Sung Park | 2022-08-02 |