Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11366390 | Extreme ultraviolet light generation system and electronic device manufacturing method | Hirokazu HOSODA, Yoshiyuki Honda | 2022-06-21 |
| 11337293 | Extreme ultraviolet light generation system and electronic device manufacturing method | Hirokazu HOSODA | 2022-05-17 |