Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11410785 | Extreme ultraviolet light concentrating mirror and electronic device manufacturing method | Masayuki Morita | 2022-08-09 |
| 11366390 | Extreme ultraviolet light generation system and electronic device manufacturing method | Takanari Kobayashi, Hirokazu HOSODA | 2022-06-21 |