Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11366390 | Extreme ultraviolet light generation system and electronic device manufacturing method | Takanari Kobayashi, Yoshiyuki Honda | 2022-06-21 |
| 11333981 | Target image capturing device and extreme ultraviolet light generation apparatus | — | 2022-05-17 |
| 11337293 | Extreme ultraviolet light generation system and electronic device manufacturing method | Takanari Kobayashi | 2022-05-17 |