Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11352274 | Gas dissolution supply apparatus and gas dissolution supply method | Suguru OZAWA, Toshifumi Watanabe, Yoichi Nakagawa | 2022-06-07 |
| 11315812 | Semiconductor manufacturing apparatus, failure prediction method for semiconductor manufacturing apparatus, and failure prediction program for semiconductor manufacturing apparatus | Jumpei Fujikata, Tensei Sato, Ryuya Koizumi | 2022-04-26 |